Sci-fi movie where robots attack humans and humans bleeding from their ears until they die

Does anybody know the name of a science fiction movie from the 70s-80s where bad robots are around, working with some bad humans if I remember right, and these robots can create a noise which hurts and kills normal human beings. They begin to bleed out of their ears and when the robots don’t stop it it kills the people. A small group of good people are running and hiding, trying to escape or to save the planet from the bad people and these robots. The robots, when I remember right, look like Robocop’s enemy ED-209 or R2-D2 in big, and in black.